Flow Sensor Modules, Flow Meters, Liquid and Gas

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IDT's line of high performance flow sensor (flow meter) modules measure gas or liquid flow. The innovative solid-state sensor element design eliminates cavities and diaphragms typically found in competitive offerings, and features a protective silicon-carbide coating, making for a very robust and reliable flow sensor element compatible with food-grade applications.

IDT offers uncalibrated stand-alone flow sensor modules with an analog output, as well as fully-calibrated versions featuring on-board analog to digital conversion and temperature compensation circuitry for plug-and-play usage in complex digital systems. The calibrated flow sensor modules offer gas or liquid measurement accuracy down to ±2% of reading.

Advanced Flow Sensor Technology

IDT's mass flow sensor measure gas flow or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The flow sensor utilize a series of MEMS thermo-couples (thermopiles), which provide excellent signal-to-noise ratio. The solid thermal isolation of the active MEMS sensing element along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability.

With no moving parts and no fragile diaphragm over a cavity, the design eliminates clogged sensor elements and fluid pressure sensitivity, and provides excellent shock resistance. In addition, the silicon-carbide coating prevents chemicals from damaging the sensor element. These technology advantages make IDT's solution especially desirable for use in industrial, medical, and FDA-compatible food-grade consumer applications where robustness, reliability, and cross-contamination are important factors.

About Liquid and Gas Mass Flow Sensors

Flow sensors, also known as flow meters, are used to measure the flow rate, and ultimately the total volume, of gases or liquids passing through module's pre-determined cross sectional area. These measurements are critical in a broad range of applications, including beverage dispensers, IV drip monitors, oxygen monitors, mass air flow sensors, and gas flow monitors in process equipment.

IDT’s MEMS-based  gas flow meter and liquid flow meter modules comprise a resistive heater, and two clusters of thermo-couples (thermopiles), each positioned symmetrically up and down-stream of the heater. The thermopile’s output changes according to the rate of flow; proportional to the amount of heat sensed from the heater. The analog output of the thermopile is typically converted into a calibrated digital output signal that can be used by the system processor.