The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.

Features

  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C

Product Options

注文可能な製品ID Part Status 説明 Pkg. Code Temp. Range 購入/サンプル
FS1012-1001-LQ Active Liquid, 0 to 0.5 SLPM MOD1 0 to 85°C
Availability
FS1012-1002-LQ Active Liquid, 0 to 1.0 SLPM MOD1 0 to 85°C
Availability
FS1012-1020-NG Active Gas, 0 to 2 SLPM MOD1 0 to 85°C
Availability
FS1012-1100-NG Active Gas, 0 to 10 SLPM MOD1 0 to 85°C
Availability

技術資料

タイトル 他の言語 タイプ 形式 サイズ 日付
データシート
FS1012 Datasheet Datasheet PDF 272 KB
アプリケーションノート、ホワイトペーパー
Whitepaper - MEMS Mass Flow Sensor White Paper PDF 347 KB
その他資料
Sensing Technologies and Sensor Solutions Overview 简体中文 Overview PDF 1.66 MB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family Product Brief PDF 236 KB

Evaluation Boards

Part Number Title 昇順で並び替え
SDAWIR Wireless Flow Rate, Humidity, and Temperature Sensing Evaluation Kit
SDAF0x Mass Flow Sensor Evaluation Kit